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  • Updated: 2023-10-20
  • Views: 8320
On October 13th, as a Chinese high-tech enterprise serving the global integration of high-end semiconductor design and development, manufacturing, sales and service, Shenzhen SlkorMicro Semicon Co., Ltd. (hereinafter referred to as SLKOR) was invited to participate in the 2023 Hong Kong Electronics Fair (Autumn Editio……
  • Updated: 2023-10-17
  • Views: 9089
On the afternoon of September 28, 2023, following the festive holidays of the Mid-Autumn Festival and National Day, Kinghelm (www.kinghelm.net)/Slkor (www.slkoric.com) organized a tea party to celebrate National Day and welcome the Mid-Autumn Festival. All employees of the company actively participated and enjoyed the ……
  • Updated: 2023-10-17
  • Views: 7735
As the cool autumn breeze drifts in and the scent of osmanthus flowers fills the air, the double holiday of Mid-Autumn Festival and National Day in 2023 has added even more festive atmosphere. Kinghelm (www.kinghelm.net) and Slkor (www.slkoric.com) have organized an internal employee essay competition for Mid-Autumn Fe……
  • Updated: 2023-10-14
  • Views: 9240
In addition to the laboratory-scale EUV light used by NIST to analyze semiconductor components, Dr. Steve Grantham also presented a wealth of resources at NIST's Synchrotron Ultraviolet Radiation Facility (SURF III) during the working group meeting. When charged particles move along a curved path, they emit synchrot……
  • Updated: 2023-10-14
  • Views: 8533
In addition to the laboratory-scale EUV light used by NIST to analyze semiconductor components, Dr. Steve Grantham also presented a wealth of resources at NIST's Synchrotron Ultraviolet Radiation Facility (SURF III) during the working group meeting. When charged particles move along a curved path, they emit synchrot……
  • Updated: 2023-10-14
  • Views: 8679
At the working group meeting, researchers from NIST discussed three main themes related to using EUV as an analytical tool to assist the semiconductor manufacturing industry. The three methods for utilizing EUV light as an analytical technique are: (1) high harmonic generation (HHG), (2) synchrotron radiation, and (3) ……
  • Updated: 2023-10-14
  • Views: 9283
The main process change that affects yield is edge-placement error (EPE). This occurs when unexpected nanoscale irregularities are displayed in the edges and sidewalls of photoresist patterns. These irregularities are random and colloquially referred to as line-edge roughness (LER). As device sizes continue to shrink, ……
  • Updated: 2023-10-14
  • Views: 8378
Absolute radiometric measurement is important not only for the development of lithography processes and instrument acceptance tests but also for the quantitative understanding of EUV light generation processes. Predictive modeling of this process has lagged behind the development of EUV tools themselves. Improving mode……
  • Updated: 2023-10-14
  • Views: 10976
NIST is currently developing an instrument for measuring SoS at higher pressures and temperatures. The SoS instrument is part of Dr. Elizabeth Rasmussen's National Research Council (NRC) postdoctoral fellowship in metal additive manufacturing. A U.S. patent on the design and operation of the instrument was submitted in……
  • Updated: 2023-10-14
  • Views: 9357
2.1 Droplet Generator: Extreme Thermophysical Properties and Modeling The droplet generator is an important component of the EUVL scanner assembly (Figure 3)……
  • Updated: 2023-10-14
  • Views: 9978
In 2022, the semiconductor market was approximately 0.6 trillion USD, and commercial analysts predict that it will double to 1.0-1.3 trillion USD by 2030. The significant growth in the semiconductor manufacturing industry can be seen in the lithography process. Lithography is a patterning process that transfers a flat ……

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