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EUV Lithography Factory? Introduction to Engineering Technology and Scientific Principles of Chip Manufacturing and Lithography (VI)

Updated: 2023-10-13
Views: 12624

From the official news of Tsinghua University in early 2023, it can be seen that the starting point of the Xiong'an SSMB project is to solve the problem of "neck bottlenecks" in chip production with the support of a ministry. It can be seen that the location and building model of the project have been determined, but i……

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EUV Lithography Factory? Introduction to Engineering Technology and Scientific Principles of Chip Manufacturing and Lithography (V)

Updated: 2023-10-13
Views: 11980

As we all know, the industry later improved the situation by using a 13.5nm EUV light source, hence the name EUV lithography. Why did they directly jump from a 193nm light source to 13.5nm? Shouldn't there have been gradual reductions like 436-365-248-193nm?

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EUV Lithography Factory? Introduction to Engineering Technology and Scientific Principles of Chip Manufacturing and Lithography (IV)

Updated: 2023-10-13
Views: 13848

The chip manufacturing process described above is applicable to both traditional chips (28nm and above) and advanced process chips (14nm and below). Currently used photolithography machines use mainly DUV light sources, with a light source generator producing ArF (argon fluoride) excimer lasers at a wavelength of 193nm……

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EUV Lithography Factory? Introduction to Engineering Technology and Scientific Principles of Chip Manufacturing and Lithography (III)

Updated: 2023-10-13
Views: 12470

Both EUV and DUV lithography machines are highly advanced machines, with high demands for industrial production volume and speed. If every step requires re-alignment, assuming that the lithography machine can only process one die per minute, it would process only slightly over 1000 dies per day, and the factory would r……

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EUV Lithography Factory? Introduction to Engineering Technology and Scientific Principles of Chip Manufacturing and Lithography (II)

Updated: 2023-10-13
Views: 14261

Some people who do not understand the process may think that chip manufacturing relies solely on lithography machines. They may mistakenly believe that a factory only needs a central lithography machine where wafers are placed, and the machine uses light

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EUV Lithography Factory? Introduction to Engineering Technology and Scientific Principles of Chip Manufacturing and Lithography (I)

Updated: 2023-10-12
Views: 14279

Recently, the SSMB-EUV light source technology proposed by Tsinghua University has attracted great public interest. One claim is that China can build accelerators to generate EUV light sources, and different frequencies of light sources can be used for various chip processes such as 28nm, 14nm, 7nm, and 5nm. Instead of……

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The eighth major semiconductor process(VIII) - Electrical Die Sorting (EDS) process

Updated: 2023-10-12
Views: 11796

Completing a semiconductor chip involves many steps, and it is important to screen out defective chips through testing. Many tests are conducted during the semiconductor manufacturing process.

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The Eight Major Semiconductor Processes (VII) - Metal Interconnect Process

Updated: 2023-10-12
Views: 11132

Semiconductors possess both "conductor" properties, allowing electric currents to pass through, and "insulator" properties, which do not allow electric currents to pass. The ion implantation process adds impurities to pure silicon to give it conductivity. We can make the semiconductor conductive or insulating depending……

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The Eight Major Semiconductor Technologies (VI) - Deposition and Ion Implantation Technology

Updated: 2023-10-12
Views: 11676

Semiconductor chips are composed of many microscale layers that are smaller than a fingernail and thinner than paper. The semiconductor is stacked high and dense, forming complex structures similar to high-rise buildings. To create such structures, the following steps need to be repeated multiple times: lithography ……

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【Daily Highlight】LM2596S-12 DC-DC voltage stabilizing power converter

Updated: 2023-10-12
Views: 8560

LM2596/LM2596HV is a fixed frequency PWM DC-DC voltage stabilizing power converter with fixed frequency of150KHz. With the 3A output current driving ability, it has characteristics such as high efficiency, low ripple wave, high linear adjustment rate and load regulation. With the PWM modulation mode, the chip can adjus……

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The Eight Major Semiconductor Processes (V) - Etching Process

Updated: 2023-10-11
Views: 12500

In the previous article, we introduced the photolithography process, which uses a photomask to project the designed circuit patterns onto the surface of the wafer coated with photoresist. The next step is to perform the etching process on the wafer to remove unwanted material and retain only the desired pattern.

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Semiconductor Manufacturing Processes (IV): Photolithography - Creating Nanoscale Circuits

Updated: 2023-10-11
Views: 11665

In previous articles, we introduced wafer fabrication, oxidation processes, and a partial history of integrated circuits. Now, let's continue to explore the photolithography process, which transfers the electronic circuit patterns onto the wafer. Photolithography is similar to taking photographs with a film camera, but……

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