Mochini oa ho Etching Chip ke Eng?

A mochine oa ho cheka chip ke sesebelisoa se ikhethileng se sebelisoang tlhahisong ea semiconductor ho khetha ho tlosa thepa ho li-wafers tsa silicon. Ts'ebetso ena, e tsejoang e le etching, e theha mekhoa e rarahaneng ea potoloho e hlokahalang bakeng sa lisebelisoa tsa elektroniki tsa sejoale-joale. Ho nepahala ha a mochine oa ho cheka chip e etsa bonnete ba hore likaroloana li kopana hantle le litlhaloso tsa moralo, e leng se etsang hore e be sa bohlokoa haholo ho hlahiseng lisebelisoa tse kang li-smartphone le likhomphutha. Ho fapana le mekhoa e tloaelehileng ea mochini, mechini e tsoetseng pele e sebelisa plasma kapa karabelo ea lik'hemik'hale bakeng sa ho nepahala ha nanoscale. Ka mohlala, lik'hamphani tse kang Lisebelisoa tse sebelisitsoeng 'me Lipatlisiso tsa Lam e laola sebaka sena, e fana ka litsamaiso tse kopanyang li-automation bakeng sa tlhahiso e phahameng. Ithute haholoanyane ka mekhoa ea semiconductor ho Mokhatlo oa Liindasteri tsa Semiconductor.

Nalane ea Nts'etsopele ea Mechini ea ho Etching Chip

Ho iphetola hoa mechini ea ho cheka chip e bonts'a tsoelo-pele ea theknoloji ea semiconductor. Lilemong tsa bo-1960, etching ea metsi e ne e busa, ho sebelisoa lik'hemik'hale tse metsi ho qhaqha silicon e sa sirelelitsoeng. Leha ho le joalo, ho phahama ha li-circuits tse kopantsoeng ho ne ho batla taolo e ntlafetseng, e lebisang ho mekhoa e omeletseng ea ho khabisa joaloka reactive ion etching (RIE) ka bo-1980. Ka bo-2000, litsamaiso tse thehiloeng ho plasma li ile tsa fetoha maemo, tsa nolofalletsa ho nepahala ha sub-10nm. Kajeno, mekhoa e mecha e kang atomic layer etching (ALE) e sutumelletsa meeli ho ea pele. Khatelo-pele ena e totobatsa kamoo mochine oa ho cheka chip bokhoni bo thehile Molao oa Moore, o lumellang li-transistors ho honyela ha ts'ebetso e ntse e phahama.

Melemo ea Bohlokoa

• Li-1960: Kenyelletso ea etching e metsi bakeng sa li-IC tsa pele.
• Li-1980: Fetolela ho omisa etching bakeng sa ho nepahala ho holimo.
• Li-2000: Plasma etching e finyella ho nepahala ha tekanyo ea nanometer.
• Li-2020: Atomic layer etching (ALE) e thusa meralo ea 3D chip.

Litšobotsi tsa Mechini ea ho Etching Chip

mokhoa oa kajeno oa mechini ea ho cheka chip li hlalosoa ka litšobotsi tse tharo tsa mantlha: ho nepahala, ho hlaka, le ho feto-fetoha ha maemo. Precision e netefatsa tahlehelo e nyane ea thepa, e bohlokoa bakeng sa li-chips tse nang le mekhahlelo e mengata. Scalability e lumella ho ikamahanya le boholo ba liphaephe ho fihla ho 450mm, ho fihlela litlhoko tsa tlhahiso ea bongata. Ho feto-fetoha ha maemo ho tsoa ho meralo ea modular e tšehetsang etching ea lik'hemik'hale le plasma. Mohlala, Elektrone ea TokyoSistimi e fana ka metsoako ea khase e ka lokisoang ho sebetsana le lisebelisoa tse fapaneng tse kang silicon, oxides le tšepe. Litšobotsi tsena li etsa mechini ea ho cheka chip e bohlokoa bakeng sa ho etsa li-node tse tsoetseng pele ka 5nm le lits'ebetso tse ka tlase.

Mekhahlelo ea Mechini ea ho Etching Chip

khethang a mochine oa ho cheka chip e hloka ho lekola liparamente joalo ka sekhahla sa etch, ho tšoana, le khetho. Sekhahla sa Etch se etsa qeto ea ho feta, athe ho tšoana ho netefatsa liphetho tse tsitsitseng ho pholletsa le li-wafers. selectivity-bokhoni ba ho shebana le lisebelisoa tse itseng-ho fokotsa tšenyo ea lihlopha tse ka tlaase. Sistimi e tsoetseng pele e boetse e beha leihlo liparamente tsa nako ea nnete joalo ka plasma density le ion energy. Ka mohlala, ASMLLisebelisoa li sebelisa li-sensor ho fetola maemo ka matla, ho ntlafatsa ts'ebetso. Li-metrics tsena li ama ka kotloloho ho kotuloa le ho sebetsa hantle ha litšenyehelo, ho li etsa hore e be tsa bohlokoa haholo bakeng sa lihlopha tse rekang thepa.

Likarolo tsa Mechini ea ho Etching ea Chip ho Tlhahiso ea Semiconductor

Ka tlhahiso ea semiconductor, mechini ea ho cheka chip sebeletsa likarolo tse peli tsa mantlha: phetisetso ea mohlala le ho tlosa thepa. Nakong ea photolithography, mekhoa e hlophisitsoeng e hlalosa liheke tsa transistor le li-interconnect. Ka mor'a ho beha, etching e tlosa lisebelisoa tse feteletseng ho arola likarolo. Ts'ebetso ena e habeli e netefatsa hore li-chips li kopana le litlhaloso tsa motlakase le tsa mocheso. Ha lisebelisoa li ntse li fokotseha, karolo ea mechini ea ho cheka chip e atoloha ho kenyelletsa sebopeho sa 3D bakeng sa lisele tsa memori joalo ka NAND flash. Likhatelo-pele tse joalo li totobatsa ho se khonehe ha bona ho etsoa ka mokhoa o tsoetseng pele.

Lisebelisoa tsa Mechini ea ho Etching Chip

Mechini ea ho lokisa chip ke tsa bohlokoa ka har'a liindasteri:

• Consumer Electronics: E hlahisa li-CPU, li-GPU, le li-memory chips bakeng sa lisebelisoa.
• Likoloi: Ho etsa li-sensor le li-IC tsa taolo ea matla bakeng sa li-EV.
• Tlhokomelo ea bophelo: Ho theha li-biochips bakeng sa tlhahlobo ea bongaka.

Lisebelisoa tse ntseng li hlaha li kenyelletsa komporo ea quantum le lisebelisoa tsa elektroniki tse feto-fetohang, moo etching e nolofalletsang meralo e mecha. Ka mohlala, Intel e sebelisa etching e tsoetseng pele ho haha ​​​​li-transistors tse pakiloeng bakeng sa li-accelerator tsa AI.

Baetsi ba Mechini ea ho Etching Chip

isang mochine oa ho cheka chip bahlahisi ba kenyelletsa:

• Lisebelisoa tse Sebelisitsoeng: E tsebahala ka litsamaiso tse phahameng tsa plasma.
• Patlisiso ea Lam: E sebetsa ka ho khetheha ka tharollo ea dielectric le tšepe etching.
• Elektrone ea Tokyo (TEL): E fana ka litsamaiso tse nyalisitsoeng bakeng sa lisebelisoa tse fapaneng.

Lifeme tsena li tsetela haholo ho R&D ho sebetsana le liphephetso tse joalo ka phoso ea ho beha sebaka le ho se be teng, ho netefatsa hore lisebelisoa tsa bona li fihlela litlhoko tsa mofuta o latelang.

fihlela qeto e

Ho tloha ho nolofalletsa li-circuits tsa nanoscale ho matlafatsa mahlale a mahlale a lefats'e, mechini ea ho cheka chip lula e le mokokotlo oa tlhahiso ea semiconductor. Lihlopha tsa ho reka le tsa boenjiniere li tlameha ho etelletsa pele liparamente, lits'ebetso, le boiphihlelo ba barekisi ha ba khetha litsamaiso tsena. Ha indasteri e ntse e hatela pele ho li-node tsa 2nm le ho feta, karolo ea mechini ea ho cheka chip e tla mpefala le ho feta.